INSTITUTO DE QUIMICA, FISICA DE LOS MATERIALES, MEDIOAMBIENTE Y ENERGIA
Unidad Ejecutora - UE
Design of Low Cost Gas Sensor Based on SrTiO3 and BaTiO3 Films
SATREERAT K. HODAK; THIDARAT SUPASAI; ANURAT WISITSORAAT; JOSE H. HODAK
Journal of Nanoscience and Nanotechnology
We have prepared SrTiO3/BaTiO3 multilayer film on alumina substrates by a solgel technique andinvestigated their response for sensing ethanol vapor. The surface morphology of the films werecharacterized by atomic force microscope (AFM) showing that the grain size of the films increaseup to 40 nm as the annealing temperature increased to 1000 C. The ethanol sensors based onSrTiO3/BaTiO3 thin films were fabricated by applying interdigitated gold electrodes by sputteringtechnique. The ethanol sensing characteristics of SrTiO3/BaTiO3 thin films were quantified by thechange in resistance of the sensors when they were exposed to ethanol. The optimum operatingtempearature of these sensors was found to be 350 C. In addition, the film annealed at 1000 Cexhibited p-type gas sensing behavior with the best sensitivity of 30100 for low ethanol concentrationin the range of 1001000 ppm.