Nano/microstructuring of ceramic surfaces by unconventional lithographic methods

R.C. SALVAREZZA, O. AZZARONI

Nanofabrication: Fundamentals and Applications

Año: 2008; p. 475 - 501

Design of reproducible, simple and efficient nanofabrication routes has become afrontier topic in the emerging field of nanotechnologies. In this chapter we discussthe “state of the art” of ceramics micro- and nanofabrication techniques. We payspecial attention to progress in this field made during the last five years.In this chapter we will discuss about the progress on the use of lithographic toolsto create nanoscale ceramic patterns or the potential of soft lithography to createceramic structures by means of liquid ceramic precursors. The chapter also describesadvances on the use of self-assembly and self organization to achieve nanostructuredceramic surfaces. In the final part, we discuss about the possibility of combiningphysical vapour deposition with micromolding techniques to obtain nanostructuredceramic subtrates.