INIFTA   05425
INSTITUTO DE INVESTIGACIONES FISICO-QUIMICAS TEORICAS Y APLICADAS
Unidad Ejecutora - UE
artículos
Título:
Interface dynamics during shadow-mask physical vapor: Cu micropatterns on non-metallic substrates
Autor/es:
P. C. DOS SANTOS CLARO; P. L. SCHILARDI; B. BLUM; M. F. CASTEZ; R. C. SALVAREZZA
Revista:
PHYSICAL REVIEW B - CONDENSED MATTER AND MATERIALS PHYSICS
Editorial:
American Physical Society
Referencias:
Año: 2007 vol. 76 p. 2054361 - 2054365
ISSN:
0163-1829
Resumen:
We have studied the interface dynamics during the growth of microscopic ordered Cu features deposited on different nonmetallic substrates by shadow-mask physical vapor deposition. Optical and atomic force microscopy data show the formation of either transparent or opaque patterned Cu depending on the film thickness. The evolution of the patterned film, the shadowed and the exposed regions, and the pattern shape are well described in terms of a continuous mesoscopic model, implying that masked deposition induces through evaporation-condensation processes an overall downhill current that results, under the small slope approximation, in Edwards-Wilkinson behavior.through evaporation-condensation processes an overall downhill current that results, under the small slope approximation, in Edwards-Wilkinson behavior. an overall downhill current that results, under the small slope approximation, in Edwards-Wilkinson behavior.