INTEC 05402
INSTITUTO DE DESARROLLO TECNOLOGICO PARA LA INDUSTRIA QUIMICA
Unidad Ejecutora - UE
artículos
Título:
Titanium oxidation-reduction at low oxygen pressure under electron bombardment
Autor/es:
BRASCA, R.; PASSEGGI (JR.), M.C.G.; FERRON, J.
Revista:
THIN SOLID FILMS
Editorial:
Elsevier Science
Referencias:
Lugar: Amsterdam, Holanda; Año: 2006 vol. 515 p. 2021 - 2025
ISSN:
0040-6090
Resumen:
The effect of the electron bombardment on the first stages of the titanium oxidation process has been studied by means of Auger Electron Spectroscopy. Using Factor Analysis and the valence electron dependence behavior of the titanium LMV Auger transition, we found that the process is strongly dependent on the oxygen pressure and electron current density. Depending on the irradiation conditions, films of different thickness and Ti oxidized states are obtained.
