INTEC   05402
INSTITUTO DE DESARROLLO TECNOLOGICO PARA LA INDUSTRIA QUIMICA
Unidad Ejecutora - UE
artículos
Título:
Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
Autor/es:
VERONIQUE ROCHUS; STEPHANIE GUTSCHMIDT; ALBERTO CARDONA; CHRISTOPHE GEUZAINE
Revista:
IEEE TRANSACTIONS ON MAGNETICS
Editorial:
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Referencias:
Año: 2012 vol. 48 p. 355 - 358
ISSN:
0018-9464
Resumen:
Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.