CIOP 05384
CENTRO DE INVESTIGACIONES OPTICAS
Unidad Ejecutora - UE
congresos y reuniones científicas
Título:
Fabrication of Silicon Nitride PIC by Laser Direct Writing
Autor/es:
BULUS ROSSINI, LAUREANO A.; COSTANZO CASO, PABLO A.; GUSTAVO TORCHIA; ALEJANDRO FASCISZEWKI; MAURICIO TOSI; SANCHIS PABLO
Lugar:
Paris
Reunión:
Conferencia; European Conference on Integrated Optics (ECIO); 2020
Resumen:
We report our first results in the fabrication of photonic integrated circuits in silicon nitride platform by laser direct writing. These are novel and preliminary results in the area of micro-fabrication of photonic integrated circuits in Argentina and the Latin-American region. We were able to demonstrate the feasibility to carry out a maskless high-resolution lithography via a low cost process.
