Ultrashort Laser Micromachining of Shadow Masks for Film Deposition

S. SUAREZ; F. VIDELA; A DEMARCO; B GOMEZ; GA. TORCHIA

Ischia

Conferencia; Conference on Laser Ablation; 2013

In the last decade, ultrashort laser micromachining to fabricate micro ablated structures has given rise to a huge growth mainly due to the absence of the thermal effects as well as due to the large number of materials that can be processed by this technique. In this work, we present a suited micro machined copper shadow masks fabricated by using fs laser pulses.  In order to achieve high performance open tracks, meaning smooth and perfectly straight cuts; we have optimized the writing parameters such as the speed and the energy for every laser pulse. The mask was recorded in a copper film of 100 microns thickness.  For conducting the micromachining, we have used a 3D motorized station with a minimum displacement of 0.05 microns for each axis. Chirped pulse amplification (CPA) Ti: Saphire laser system was also used; it can deliver 100 fs pulse width,          1 KHz repetition rate and up to 1 mJ energy per pulse. We also show preliminary results of silver micro strips obtained by using RF sputtering deposition over silicon wafers through the resultant shadow mask.